The semiconductor industry has stringent requirements for highly specialized, high purity chemicals, gases and materials in the device manufacturing process.
The semiconductor industry has stringent requirements for highly specialized, high purity chemicals, gases and materials in the device manufacturing process.
In order to meet customer requirements for particle limits in microelectronic devices, electronic chemicals must be delivered to device manufacturers in very small amounts and tiny particles.
The microelectronics industry is particularly dependent on highly specialized, high-purity chemicals, gases and materials for device manufacturing. Electronic chemicals must be delivered to device manufacturers in very small quantities and tiny particles.
Filters are used to remove particles in a multi-stage filtration process, beginning with pre-filtration of raw materials and continuing through to final filtration in the final packaging step to meet customers’ stringent particle specifications.
The wafer cleaning process removes particles that cause defects, as well as contamination from organic matter and metal ions. Photoresist removal requires the use of very aggressive, high-temperature acidic chemicals or strong organic solvent mixtures. Special acidic mixtures are used to precisely control the thickness of the dielectric layer to meet stringent specifications.
These very different processes require special attention to chemical and temperature compatibility, flow rates, and the ability to remove erosion and the high particle load that can result from the gel removal process when selecting the appropriate filter.
Chemical and grind delivery systems are an efficient and safe way to deliver high volumes of chemicals and solvents to process equipment in a clean room.
These systems are fitted with cartridge filters of PFA, PP or even stainless steel for particle removal from drums or barrels to protect the chemical lines and the process being supplied.
By ensuring the functionality and durability of your equipment, Sanitek’s tailored filtration solutions contribute to long-term cost savings on maintenance and operational expenses.
Sanitek’s market-leading filtration systems specialize in the removal of oil and particles from water streams, addressing environmental regulations or injection well standards. Our innovative offerings encompass oil adsorptive guard filters, high-efficiency coalescers, as well as disposable and washable solid cartridge solutions.
For this specific application, Sanitek designs and manufactures filter cartridges and filter housings. Our Oltek pleated filter cartridge and Oltek string wound filter cartridge stand out as ideal solutions for maintaining the required purity levels in this condition.
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