Compressed Air and Pressurized Gases

Millions of dirt particles, significant volumes of water and oil, and even heavy metals like lead, cadmium, and mercury can all be found in one cubic foot of compressed air. Long-term trouble-free operation of the system's parts, such as valves and cylinders, cannot be guaranteed if they are not filtered out.

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Compressed air and pressurized gases are widely used in the semiconductor industry for product manufacturing. The purity and stability of gases are essential to ensure product quality and manufacturing efficiency.

From metal deposition to silicon doping, to wafer drying and photoresist removal, gases play an important role in all aspects of manufacturing in the microelectronics industry.

In order to meet the stringent requirements of the process, gas filtration has become an essential part of the process.


Inert and specialty gases are used in semiconductor processing for critical process steps such as metal deposition, silicon doping, wafer drying, and photoresist removal.

These processes require a supply of particle-free gases to ensure process consistency and yield stability. In-line gas filters remove unwanted particles, protecting sensitive components and critical “dry” process steps.


Fab System

Plant services systems are required to provide clean chemicals, ultra-pure water and clean process gases throughout the wafer fabrication facility (FAB).

In order to maintain process stability, high demands are placed on the stability and consistency of filtration of the filter elements used. The application of filters in the fab system helps to remove impurities and particles to ensure the quality of process gases and liquids, thus ensuring product quality and productivity.

Power system

The power system needs to provide clean chemicals, ultra-pure water and clean process gases for long time without interruption for high generation flat panel display manufacturing.

High demands are placed on the stability of filtration to ensure a continuous supply of chemicals and gases that meet specifications. Filter applications in power systems help remove particles and impurities, protect equipment, and ensure process stability and product quality.

Selecting the appropriate cartridge and filter

Particle removal efficiency

The microelectronics industry requires a very high level of gas purity, so the cartridge should be able to effectively remove minute particles to ensure product quality and process stability.

Chemical Compatibility

Some gases may trigger reactions or contamination when in contact with specific materials, so ensure that the appropriate materials and cartridges are selected to ensure gas purity and stability.

Pressure drop and flow rate

Filters should be able to provide sufficient flow to meet the demands of the manufacturing process while maintaining a low pressure drop to avoid negative impacts on system performance.

Long Life and Stability

For applications that require long periods of continuous operation, it is important to select cartridges and filters with long life and stability. This reduces the frequency of cartridge replacement, reduces maintenance costs, and ensures stable gas filtration.

Cleaning and maintenance

Make sure to select cartridges and filters that are easy to clean and maintain to ensure their long-term effective operation.

What Sanitek can do in this procedure?

By ensuring the functionality and durability of your equipment, Sanitek’s tailored filtration solutions contribute to long-term cost savings on maintenance and operational expenses.

Sanitek’s market-leading filtration systems specialize in the removal of oil and particles from water streams, addressing environmental regulations or injection well standards. Our innovative offerings encompass oil adsorptive guard filters, high-efficiency coalescers, as well as disposable and washable solid cartridge solutions.

For this specific application, Sanitek designs and manufactures filter cartridges and filter housings. Our Oltek pleated filter cartridge and Oltek string wound filter cartridge stand out as ideal solutions for maintaining the required purity levels in this condition.

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